[EUVL Part4] EUV Mask
![[EUVL Part4] EUV Mask](http://i2.hdslb.com/bfs/archive/62173cf5f03ba51c68ea075696d48e1488f06421.png "[EUVL Part4] EUV Mask")
来去本无我:
我发布了一篇笔记，快来看看吧
EUVL Part4视频脚本总结：解决了EUV Mask黑边区域的反射问题，通过刻蚀多层结构抑制多次曝光挑战。掩模寿命问题源于氢气引起的起泡缺陷，需要生成...
https://www.bilibili.com/h5/note-app/view?cvid=33618892&pagefrom=comment
半导体 光刻机
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